前苏联高真空扩散泵统一系列工作的回顾

Revieus of high vacuum diffusion pumps manufactured in former USSR

详细地介绍了前苏联1953年由国家制订的高真空油扩散泵工业产品的统一系列。该系列包括五种规格，在入口压力为1×10^-4～1×10^-5 Torr（1Torr=133Pa，下同）范围内，对空气的抽速为100～8000L／s，用Ⅱ-1A号泵油获极限压力为（2～5）×10^-6 Torr。以后又补充一台H-40T大泵抽速为32000L／s。抽速100和500L／s的泵为二级喷咀；抽速为2000、5000和8000L／s的泵为三级喷咀，而32000L／s的大泵出口连接一台BH-3型油增压泵。所有这些泵的最大出口压力不低于0．1Torr，因此前级泵可直接用机械真空泵，不必用增压泵即能正常工作。1990年按国际标准口径又研制了新系列产品，性能有所改进。本文对目前我国生产高真空系列扩散泵有一定的参考价值。

Describes in detail the unified standards formulated in 1953 for the series of high vacuum oil diffusion pumps manufactured in the former USSR. The series included five sizes of pumps. The oil in Д-1A pump could come to the ultimate pressure （2- 5）× 10^-6 Torr when the inlet pressure was in the range of 1 × 10^-4- 1 × 10^-6 Torr and the pumping speed of air was 100-8000 L/sec. Later on, a big-size pump H-40T with a pumping speed 32000 L/sec was used as a complement. In addition, the pumps with 100 and 500 L/sec wer used as the secondary-stage nozzles, and the pumps with 2000, 5000 and 8000 L/sec used as tertiary-stage nozzles. The big-size pump with pumping speed 32000 L/sec was then connected to a BH-3 oil booster pump. The outlet pressure of all those pumps were not lower than 0.1 Torr, and it follows that those pumps can run well by using directly the mechanical vacuum pumps as backing pumps without booster pump used. In 1009 new series of products were developed with performance improvement according to the size of International standard. What are discussed above will play a role of guidance in the manufacture of series HV diffusion pumps in China today.