正交梁式隧道效应微机械陀螺仪的设计与仿真

Structural Design and Simulation Analysis on Orthogonal-Beam Micromachined Tunneling Gyroscope

针对传统的角速率陀螺仪存在的缺点与不足,根据电子隧道效应的特点,设计了一种新型基于隧道效应的微机械陀螺仪,运用计算机辅助软件ANSYS对其进行了建模和仿真.把电子隧道原理应用到微机械振动陀螺中对振动位移进行检测,结构简单,功耗低,抗干扰能力强,可靠性好,线性度高,具有很高的灵敏度,尤其在提高微机械振动陀螺的测量精度和灵敏度的方面显示其优势.

Aim at the disadvantage of traditional micromachined gyroscope, a novel orthogonal-beam tunneling gyroscope is designed according to the characteristic of tunneling effect. A mathematical model is established and modal analysis is presented by using ANSYS software. The principle of tunneling effect is applied to micromachined gyroscope to detect vibration displacement. It has advantages of simply structure, low power, strong anti-interference, fine reliability, high linearity, especially high sensitivity and measurement accuracy.