阴极真空弧放电等离子体的过滤及传输

FILTRATION AND TRANSPORTATION OF CATHODE VACUUM ARC DISCHARGE PLASMA

阴极真空孤放电产生高密度等离子体的同时，也产生了尺寸可达微米量级的液滴，液滴对膜层的污染限制了它的应用。为解决这个问题，可采用轴对称磁场约束阴极斑，磁过滤器过滤等离子体出束中的液滴。结果表明液滴在磁过滤器出口处已基本上被过滤掉了，该处离子束流达到１２０ｍＡ。

Cathode vacuum arc discharge plasma deposition is a promising technique for the production of thin films. Along with the plasma, droplets of size up to some microns are produced at the cathode spots. Contammation of the films by droplets represents a major obstade to broad application of cathode vacuum are discharge plasma deposition. Attempts have been made to solve this problem by steering the cathode spots by a magnetic field, and by removing the droplets by a magnetic filter. Results show that droplets have been filtered out at the magnetic filter's exit, and the ion beam current here has reached 120 mA.