超声微结构加工钻的研究

Study on Ultrasonic Driller for Microstructure Manufacture

超声加工是一种新型的特种加工方法,它特别适合于不导电、硬脆和难熔的材料加工。该文利用了精确四端网络法和有限元相结合的方法,设计并制造出可用于微细孔和微三维结构加工的超声钻。通过实验测试的方法,对超声钻进行了测试,验证了有限元分析的结果。同时进行了钻孔实验,对超声钻的性能进行了评估。

Ultrasonic machining is a novel manufacture method, which is suitable for maching of nonconductive, brittle, hard and infusible material. In this article, precision four terminal network method and finite element method （FEM） are applied to design ultrasonic tool for machining mi＇crostructure. Experiments were done to test this ultrasonic tool and verified the FEA results. Drilling experiments are also done to test the performance of this ultrasonic driller.