摘要
针对微机械系统(MEMS)工艺几何仿真提出了一种算法,该算法通过设置实体模型上表面的实体和高度两个属性,解决了MEMS工艺几何仿真中产生的多个实体模型之间相对位置定义的问题。该算法在工艺几何仿真系统中的实现表明,使用此算法后,系统运行稳定可靠,仿真速度快。
An algorithm is explored to MEMS process geometrical simulation by setting 3D models＇ top surface solids and heights, which can give a good resolution of definition for the relative position among 3D models carried out in MEMS process geometrical simulation. The algorithm is well realized in MEMS process geometrical simula- tion and indicates that the speed of simulation is much higher than that in systems available now.
出处
《压电与声光》
CSCD
北大核心
2007年第1期96-99,共4页
Piezoelectrics & Acoustooptics
基金
国家"八六三"/MEMS重大专项基金资助项目(2005AA404240)
