期刊文献+

硬质多层膜研究进展 被引量:3

Research Progress in Hard Multilayer Coatings
下载PDF
导出
摘要 总结了硬质多层膜改善力学性能、摩擦性能、高温氧化性能、腐蚀性能的方法及进展,指出了有效途径。 Improvement and progress in mechanical, tribological properties, high-temperature oxidation and corrosion resistance of hard multilayer coatings were summarized. Efficient methods were put forward.
作者 刘宏玉
出处 《金属功能材料》 CAS 2007年第1期37-40,共4页 Metallic Functional Materials
关键词 硬质膜 多层 力学性能 摩擦性能 抗高温氧化性 抗腐蚀性 hard film multilayer mechanical property tribological property high-temperature oxidation resistance corrosion resistance
  • 相关文献

参考文献28

  • 1Jin Jung Jeong,Sun Keun Hwang,Chongmu Lee.Hardness and adhesion properties of HfN/Si3N4 and NbN/Si3N4 multilayer coatings[J].Materials Chemistry and Physics,2002,77:27~33.
  • 2Okumiya M,Griepentrog M.Mechanical properties and tribological behavior of TiN-CrA1N and CrN-CrAlN multilayer coatings[J].Surf,Coat Tech,1999,112:123~128.
  • 3Bull S J,Jones A M.Multilayer coatings for improved performance[J].Surf Coat Tech,1996,78:173~184.
  • 4Koehler J S.Attempt to design a strong solid[J].Phys Rev B,1970,2:547~551.
  • 5PalDey S,Deevi S C.Single layer and multilayer wear resistant coatings of (Ti,Al)N:a review[J].Materials Science and Engineering,2003,A342:58~79.
  • 6Carvalho S et al.PVD grown (Ti,Si,Al)N nanocornposite coatings and (Ti,Al)N/(Ti,Si)N multiplayer:structural and mechanical properties[J].Surf Coat Tech,2003,172:109~ 116.
  • 7Veprek S,Reiprich S.Shizhi Li,Superhard nanocrystalline composite materials:The TiN/Si3N4 system[J].Appl Phys Lett,1995,66:2640~2642.
  • 8Stan Veprek.New development in superhard coatings:the superhard nanocrystalline-amorphous composites[J].Thin Solid Film,1998,317:449~454.
  • 9Ducros C,Benevent V,Sanchette F.Deposition,characterization and machining performance of multiplayer PVD coatings on cemented carbide cutting tools[J].Surf Coat Tech,2003,163-164:681~688.
  • 10李成明,张勇,李桂英,曹尔妍,吕反修.过滤电弧沉积的TiN/TiCrN/CrN/CrTiN多层膜[J].中国有色金属学报,2003,13(1):167-171. 被引量:8

二级参考文献27

  • 1顾卓明,王亮,杨烈宇.离子镀不锈钢多层膜的研究[J].真空,1993,30(2):20-23. 被引量:2
  • 2[1]Sathrum P, Coll B F. Plasma and deposition enhancement by modified arc evaporation source[J]. Surface and Coatings Technology, 1992, 50: 103-109.
  • 3[2]Vetter J. Vacuum arc coatings for tools: potential and application[J]. Surf Coat Technol, 1995, 76/77: 719-724.
  • 4[3]Anders A. Growth and decay of macroparticles: Afeasible approach to clean vacuum arc plasma[J]. J Appl Phys, 1997, 82(8): 3679-3688.
  • 5[4]Baouchi A W, Perry A J. A study of the macroparticle distribution in cathodic arc evaporated TiN films[J]. Surf Coat Technol, 1991, 49: 253-257.
  • 6[5]Ravi S, Silva P, Xu S, et al. Nanocrystallites in tetrahedral amorphous carbon films[J] . Appl Phys Lett, 1996, 69: 491-496.
  • 7[6]Cheah L K, Shi X, Tay B K, et al. Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition[J]. Surf Coatings Technol, 1998, 105: 91-96.
  • 8[7]Larsson M, Bromark M, Hedenqvist P, et al. Mechanical and tribological properties of multilayered PVD TiN/NbN coatings[J]. Surface and Coatings Technology, 1997, 91: 43-49.
  • 9[8]Zeng X T. TiN/NbN superlattice hard coatings deposited by unbalanced magnetron sputtering[J]. Surf Coat Technol, 1999, 113: 75-79.
  • 10[9]Zhou Y M, Asaki R, Higashi K, et al. Sliding wear behavior of polycrystalline TiN/CrN multilayers against an alumina ball[J]. Surf Coat Technol, 2000, 130: 9-14.

共引文献31

同被引文献38

引证文献3

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部