外腔半导体激光器在微振动测量中的应用

Applications of External-Cavity Semiconductor Laser in Microvibration Measurement

基于外腔半导体激光器(ECSL)良好的相干特性,采用Littrow自准直外腔方式进行了实验,得到了良好的线宽和稳定的功率,验证了外腔半导体激光器运用于纳米级光学测量和微振动测量的可行性;提出了解决外界扰动的反馈光路方案,能够有效滤除环境振动和噪声干扰,提高了振动测量系统在现实环境中的适应能力.

Based on excellent coherence of the External-Cavity Semiconductor Laser （EGSL）, the experiment of favorable spectral line width and steady power were got by using autocollimation external-cavity of Littrow. It is proved that ECSL can be used in the measurement of nanometrology and microvibration. A method of feedback light-path to remove presented, which can improve the adaptability of the environment vibratility and noise interference was the measurement system in the environment.