摘要
利用激光驻波场会聚原子沉积纳米结构的技术可以用来研制纳米结构长度传递标准.当激光驻波场的频率大于原子的共振频率时,原子由于受到偶极力的作用将被会聚到驻波的波节处.采用了一种新的技术方案减小了实验对大的激光功率的要求.利用激光驻波场会聚准直性较好的Cr原子,并使其沉积在硅基片上形成纳米光栅结构.经原子力显微镜测试表明纳米光栅的周期为215nm.
The technology of laser-focused atomic deposition can be used to develop the nanostrucrure transfer standard of length. When the frequency of laser standing wave is higher than the resonant frequency Of atoms, the atoms will be focused on the wave node of the standing wave. The collimated Cr atoms are focused by a standing-wave laser field as they are deposited on a silicon substrate. Atomic force microscopy measurements shows a spacing of 215nm.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2007年第3期1365-1369,共5页
Acta Physica Sinica
基金
上海市纳米技术专项基金(批准号:0259nm034
0452nm029)资助的课题.~~
关键词
激光偶极力
纳米计量
原子沉积
蓝失谐
laser dipole force, nanometmlogy, atoms deposition, blue detufiing