激光驻波场形成Cr原子沉积纳米光栅的初步实验研究

The preliminary result of laser-focused Cr atomic deposition for fabricating nanostructure

利用激光驻波场会聚原子沉积纳米结构的技术可以用来研制纳米结构长度传递标准.当激光驻波场的频率大于原子的共振频率时,原子由于受到偶极力的作用将被会聚到驻波的波节处.采用了一种新的技术方案减小了实验对大的激光功率的要求.利用激光驻波场会聚准直性较好的Cr原子,并使其沉积在硅基片上形成纳米光栅结构.经原子力显微镜测试表明纳米光栅的周期为215nm.

The technology of laser-focused atomic deposition can be used to develop the nanostrucrure transfer standard of length. When the frequency of laser standing wave is higher than the resonant frequency Of atoms, the atoms will be focused on the wave node of the standing wave. The collimated Cr atoms are focused by a standing-wave laser field as they are deposited on a silicon substrate. Atomic force microscopy measurements shows a spacing of 215nm.