确定ZnO颗粒生长方向的电子背散射衍射方法

An EBSD method for identifying growth direction of tetrapod-like ZnO particles

发展了利用扫描电子显微镜(SEM)与电子背散射衍射系统(EBSD)对微晶颗粒空间取向进行表征的新方法,对以气相氧化方法制备的纳米晶ZnO颗粒的生长方向进行了测量。在样品台两个不同的倾转角度下采集两幅ZnO颗粒图像,对这两幅图做图像分析,测量各枝晶臂在样品台不同倾转角时的投影角度,可以确定ZnO颗粒枝晶臂的生长方向在样品台坐标系中的空间取向,并获得各枝晶臂的长度和夹角。由EBSD确定ZnO颗粒对应的枝晶臂晶格坐标与样品台坐标之间的空间几何关系。并根据坐标变换关系可确定枝晶臂空间生长方向的晶体学取向是沿[0001]方向。

This paper proposed a method to characterize the orientation of micro-crystalline particles by using scanning electron microscope （SEM） and electron back scattering diffraction （EBSD）. Nano-crystalline ZnO particles prepared by vapor phase oxidation method were used. Firstly, with the aid of image analysis, the projected angles of each branch of ZnO particles were measured at two different stage tilt angles. According the geometrical relationship of these two teams of projected angles, the lengths and the growth direction in stage coordinates of branches of ZnO particles can be acquired. Secondly, with the EBSD orientation analysis, the relationship between crystal coordinates and stage coordinates was measured. Finally, according the formula of coordinates transform, the crystal orientation of the growth direction of ZnO was identified to be [0001].