液相法电沉积类金刚石薄膜的表面形貌研究

Surface morphology of diamond-like carbon films prepared by liquid deposition

采用脉冲直流电源,以甲醇有机溶液作为碳源,在常压60℃的条件下,采用电化学沉积方法在不锈钢表面制备了类金刚石碳薄膜。在电沉积过程中电流密度最高达到150 mA/cm2,沉积速度为500 nm/h。用原子力显微镜和扫描电镜表征了薄膜的表面形貌,透射电镜和电子衍射谱表征了薄膜的结构。结果表明:沉积的类金刚石碳DLC膜是由均匀分布的球形纳米颗粒组成,粒度约为300 nm-400 nm,而且致密光滑;不锈钢上沉积的类金刚石薄膜,薄膜的生长是在基体表面划刻的边缘形核中心开始生长,并且生长先由基体的边缘向中心然后逐渐覆盖基体表面。

Diamond-like carbon （DLC） films were deposited on stainless steel substrates at atmospheric pressure and low temperature （60℃） by electrolysis in a methanol solution with a pulsed power supply. The deposition rate can be enhanced to 500 nm/h by increasing the current density up to 150 mA/cm^2 . The morphology and microstructure of the resulting DLC films were analyzed using atomic force microscope （AFM）, scanning electron microscope （SEM）, transmission electron microscope （TEM） and transmission electron diffraction （TED）. Deposition reaction mechanism was analyzed： the nucleation centers of DLC films prepared by electrolysis in a methanol solution began to grow on the scored surface edges of substrate and gradually overlay the whole substrate surface.