摘要
传统的以PC机为控制核心的AFM(atomic force microscope)越来越无法满足快速成像的要求,具有先进控制系统的高速AFM正成为国内外的一个研究热点。本文介绍了一种以DSP(digital signal processor)为控制核心的AFM系统。在该系统中,自动进针/退针、扫描电压的产生、A/D采样、D/A输出以及数字闭环反馈控制等任务均在DSP控制下完成;在分辨率为512×512时,可以获得行频55 Hz的扫描速度。实验表明,即便在这样高速扫描的情况下,该系统仍具有良好的成像性能。
The traditional AFM(atomic force micrascope)systems based on PC(personal computer) can not meet the requirement of high-speed scanning.So the research on high-speed AFM with advanced control system is becoming a hotspot in this area.This paper introduced a new AFM system that used DSP(digital signal processor) as control core.Tasks like probe auto-approaching/departing,scanning voltage generating,digital close-loop feedback control and so on are all implemented under the control of DSP.Due to the ability of high speed of data processing of DSP,the maximum line scanning rate acquired presently by our experiments rises as high as 55 Hz with the resolution of 512×512.Moreover,experiments showed that the whole system has good performance of imaging,even though it works at a very high scanning rate.
出处
《电子显微学报》
CAS
CSCD
2007年第1期40-43,共4页
Journal of Chinese Electron Microscopy Society
基金
国家自然科学基金资助项目(No.10427401).~~