溶胶浸渍模板法制备有序多孔氧化钛、氧化锌薄膜

Preparation of Ordered Porous TiO_2 and ZnO Thin Films by Sol-dipping Template Method

采用溶胶浸渍模板法制备了有序多孔的氧化钛(TiO2)和氧化锌(ZnO)薄膜。首先,在洁净的玻璃基片上通过浸渍-提拉工艺组装有序的聚苯乙烯微球(PS)阵列模板;然后再采用溶胶浸渍法将TiO2和ZnO溶胶灌充到PS模板微球的间隙内;最后通过煅烧去除PS而得多孔薄膜。采用SEM观察了薄膜的表面形貌,并用XRD对薄膜的性能进行了表征。结果表明,溶胶的浓度对薄膜形貌有着显著的影响。经煅烧后,TiO2和ZnO薄膜分别为锐钛矿和六方纤锌矿结构。此外,对模板的组装及溶胶的灌注过程进行了分析。

Ordered porous TiO2 and ZnO thin films were fabricated by sol-dipping template method. Firstly, the close-packed arrays of polystyrene spheres templates were assembled orderly on clean glass substrates by dipcoating method. Subsequently, precursors sols of TiO2 and ZnO filled the spaces between the close-packed arrays of polystyrene spheres through sol-dipping method. Finally, a well-defined porous thin film with narrow pore size distributions was obtained after removing the templates by annealing. SEM and XRD estimated the morphology and characteristic of the thin films. The results showed that the sol concentration had great influences on the morphology of porous thin films. X-ray diffraction （XRD） pattern showed the porous TiO2 and ZnO thin films were anatase and wurtzite structure, respectively. Additionally, the process of template assembly and the fashion of sol pouring were also discussed.