摘要
提出了一种利用静电作用下悬臂梁的吸合电压提取MEMS薄膜沿厚度方向的平均应力梯度及弹性模量的方法,该方法的关键在于实现悬臂梁吸合电压的快速、精确计算.考虑了悬臂梁由应力梯度引起的沿宽度方向的弯曲,提高了吸合电压的计算精度.实际模拟表明该测量方法计算速度快、精度高,能够应用于实际工艺过程中材料参数的在线测量.
An electrostatically actuated in-situ measuring method for average stress gradient and elastic modulus of a MEMS film was proposed based on pull-in voltages of a set of cantilevers. The key of the measuring method is to realize rapid and accurate calculation of pull-in voltages of the cantilevers. To increase the accuracy of the measurement, bending of the cantilevers along the width direction due to the stress gradient was considered. Actual simulations indicate that the calculating speed and the accuracy of the measuring method are ideal, and the method can apply to in-situ masurement.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2007年第2期311-314,共4页
Acta Electronica Sinica
基金
江苏省自然科学基金(No.BK2006223)
关键词
悬臂梁
吸合电压
平均应力梯度
弹性模量
cantilever
pull-in voltage
average stress gradient
elastic modulus
