微型梳状线振动陀螺仪的特性研究

Research on characteristic and emulation of MEMS comb line vibration gyroscope

硅微陀螺仪是微机电系统研究的一个重要内容,由于其体积小(达到微米级别),许多在传统陀螺仪中忽略掉的干扰条件要重新进行评估。其中,温度对其性能的影响很大。本文通过分析温度对梳状线振动陀螺仪的影响,推出了检测轴输出幅值和相位与温度的关系。提出一种利用输出相位作为温度补差的新方法,经温度实验验证了这种方法的可行性,此方法为提高微型梳状线振动陀螺仪的性能提供了一种新的途径。

Silicon-MEMS gyroscope is an important part of MEMS. Due to its small size （ in the range of microns） some disturb factors that were ignored in traditional gyroscope must be evaluated again. Among these disturb factors the temperature change has great influence on the performance of MEMS gyroscope. The temperatures change influence is analyzed and the relationship between the magnitude and phase of the measurement axis and temperature was derived. A new method is proposed, which uses the output phase to compensate the temperature influence. Temperature experiment proves the feasibility of the method. It provides a new approach for improving the characteristic of MEMS comb line vibration gyroscope.