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InP/InGaAs Heterojunction Bipolar Transistor with Base μ-Bridge and Emitter Air-Bridge

基极微空气桥和发射极空气桥的InP/InGaAs HBT(英文)
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摘要 An InP-based single-heterojunction bipolar transistor (SHBT) with base μ-bndge and emitter air-bridge is reported. Because those bridges reduce parasitic capacitance greatly, the cutoff frequency fT of the 2μm ×12.5μm InP SHBT without de-embedding reaches 178GHz. It is critical in high-speed low power applications,such as OEIC receivers and analog-to-digital converters. 报道了具有基极微空气桥和发射极空气桥结构的InP单异质结双极型晶体管(SHBT).由于基极微空气桥和发射极空气桥结构有效地减小了寄生,发射极尺寸为2μm×12.5μm的InPHBT的截止频率达到了178GHz.这种器件对高速低功耗的应用非常关键,例如OEIC接收机以及模拟、数字转换器.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第2期154-158,共5页 半导体学报(英文版)
基金 国家重点基础研究发展规划(批准号:2002CB311903) 中国科学院创新基金(批准号:KGCX2-107)资助项目~~
关键词 InP HBT μ-bridge air-bridges self-aligning InP 异质结双极型晶体管 微空气桥 空气桥 自对准
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参考文献10

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