Nasicon系陶瓷湿敏材料和湿度传感器的研究

A Study on the Characteristics of Nasicon System Ceramic Humi-Sensitive Material and Humidity Sensor

根据Nasicon相(Na3Zr2Si2PO12)具有低湿阻的特点,高温合成Nasicon相Na3-xZr2Si2-xP1+xO12(0≤x≤2),添加适量成孔剂和少量金属氧化物制成Nasicon4-1和Nasicon4-3两组陶瓷湿敏材料和湿度传感器。用直流电导法判定导电机制是以离子电导为主的离子-电子混合电导。用压汞法和SEM研究了湿敏材料的孔结构。两组湿度传感器的湿阻特性均为线性,Nasicon4-1传感器具有小的低湿度电阻,而Nasicon4-3具有高的感湿灵敏度。

Nasicon phase（ Na3Zr2Si2PO12 ）have low humi-impedance at low humidity atmosphere. Two types of Nasicon4-1 and Nasicon4-3 ceramic humidity sensitive materials and humidity sensors were prepared from Nasicon phases Na3-x ZrESi2-x P1 ＋x O12 （ 0 ≤ x ≤ 2 ） which were synthesized at high temperature,with adding pore-forming materials and some metal oxides. The conduction mechanism of these two types of humi-sensitive materials is ion-electron mixed conductivity but mainly ionic conductivity, which was determined by a DC conductivity method. The pore structure of humi-sensitive materials was examined by the method of press mercury and SEM anlysis. The humi-impedance curve of Nasicon4-1 and Nasicon4-3 humidity sensor are linear. Nasicon4-1 have less impedance in the low humidity region, while the sensor of Nasicon4-3 is more sensitive to humidity change.