PET基纳米结构Ag薄膜结构及导电性能

Microstructure and conductivity of nano-structured silver films deposited on PET fabric

在室温条件下,采用磁控溅射法在PET纺粘非织造布上制备了50 nm厚的纳米结构Ag薄膜,用原子力显微镜(AFM)分析溅射真空室压强对纳米结构Ag薄膜结晶状态、粒径的影响;研究了溅射工艺参数与薄膜导电性能之间的关系。实验结果表明:溅射速率随着压强的增大先增大后减小;薄膜方块电阻的变化规律和溅射速率的变化规律一致;薄膜颗粒直径随着压强的增大先增大后减小,但在压强大于1.5 Pa时,薄膜颗粒直径随压强变化未呈现明显的变化规律。

Nano-sized silver film of 50 nm thickness was deposited onto PET nonwoven fabric by magnetron sputtering, and the effect of technical parameters, such as sputtering power, vacuum pressure, on the morphology and particle diameters of the nano-structured silver thin film was analyzed by AFM. The relationship between sputtering parameters and the conductivity of the sputter coated films was also investigated. The results showed that along with the increase of pressure, sputtering velocity increased first and then decreased. The change rule of the film＇s square resistance was the same as that of sputtering velocity. Similarly, the average diameter of the films＇ particles increased first and then decreased along with the increase of pressure, but when pressure was above 1.5 Pa, it changed erratically.