摘要
纳米操作是用于研究纳米材料、结构和装置的性质特征的基本技术,也是纳米构筑单元准备、纳米设备装配的必备技术。目前典型的纳米操作系统有基于扫描探针显微镜的系统,基于电子显微镜的系统,基于光镊的系统及混合式系统。详细阐述了各类系统的特点和发展现状。分析了末端工具、显微成像、定位与驱动、操作策略等纳米操作系统中的关键技术,并对发展趋势进行了展望。
Nano - manipulation is a fundamental technology for property characterization of nano - materials, structures and mechanisms. It is also necessary to the preparation of nano building blocks and to the assembly of nano - devices. Currently, there are mainly four kinds of typical nano - manipulation systems. The characterization and state - of - the - art of them are presented separately. The key technologies such as end -effectors, microscopes, positioning and actuators, mechanism and strategies in manipulation are analyzed. In the end, the development trends of nano- manipulation systems are discussed.
出处
《制造技术与机床》
CSCD
北大核心
2007年第3期54-57,共4页
Manufacturing Technology & Machine Tool
关键词
纳米操作
研究现状
关键技术
Nano - manipulation
State - of - the - Art
Key Technologies
