摘要
集成电路(IC)工厂设计的核心问题是微污染控制,防微振作为控制振动污染,在工程设计中占有重要的地位。防微振技术涉及的环节较多,本文提出依据现场测试与工程实践经验,把握主要环节,遵从系统性的观点,采用科学的方法,解决防微振问题。
Micro-contamination control is the hardcore in IC fab engineering design. Being the vibration contamination control, micro-vibration-proof plays an important role in the engineering design. The micro-vibration-proof technology involves quite some links. In this paper, we suggest that based on the site tests and the project experience, hold major links and follow the systematic ideas so as to find better solution for solving the problems in micro-vibration-proof.
出处
《洁净与空调技术》
2007年第1期49-54,共6页
Contamination Control & Air-Conditioning Technology
关键词
集成电路
微污染控制
振动源
防微振结构
隔振措施
IC Micro-contamination control Vibration sources Micro-vibration-proof structure Vibration isolation
