X射线双晶衍射在分布布喇格反射镜研制中的应用

Application of X-Ray Diffraction Method in Distributed Bragg Reflectors Research

本文利用Ｘ光双晶衍射的动力学理论对垂直腔面发射激光器（ＶＣＳＥＬ）的分布布喇格反射境（ＤＢＲ）的特性曲线进行了模拟研究．从中得到ＤＢＲＡｌＡｓ／ＡＩｘＧａ１－ｘＡｓ的厚度及组分ｘ值，应用所得到的这些数值进行光学薄膜反射谱的模拟计算，并与实验所测得的ＤＢＲ反射谱进行比较，得到了证实．我们应用这套方法指导ＶＣＳＥＬ外延片的生长，获得了良好的结果．

Abstract We simulated the characteristic curve of Distributed Bragg Reflectors(DBR) of Vertical Cavity Surface Emitting Lasers (VCSEL) using the double-crystal X-ray diffraction dynamics theory. Based on the simulation, the epitaxy layer thickness and A1 composition of DBR were obtained. And then, we simulated the reflectivity spectrum, it coincided well with the experiment curve. We used this method in the VCSEL research and obtained good results.