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浅谈我国三氟化氮的现状和对策 被引量:4

Introduce The Actual State of NF_3 in China And Give The Advices
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摘要 综述了我国三氟化氮的发展和现状,分析了市场形势,并提出了三氟化氮今后发展的对策。 This paper presents the development and the actual state of nitrogen trifluoride in China, analyzed the market of nitrogen trifluoride and give the advice.
出处 《低温与特气》 CAS 2007年第1期22-24,共3页 Low Temperature and Specialty Gases
关键词 三氟化氮 现状 对策 nitrogen trifluoride the actual state advice
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同被引文献13

  • 1杨彦.三氟化氮-一种新型干蚀刻气[J].低温与特气,2006,24(4):28-30. 被引量:8
  • 2Tsai W T.Environmental and health risk analysis of nitrogen trifluoride (NF3),a toxic and potent greenhouse gas[J].J Hazard Mater,2008,159(2-3):257-263.
  • 3Takubo T,Hirose Y,Kashiwagi D,et al.Metal phosphate and fluoride catalysts active for hydrolysis of NF3[J].Catal Commun,2009,11(3):147-150.
  • 4Vileno E,LeClair M K,Suib S L,et al.Thermal decomposition of NF3 with various oxides[J].Chem Mater,1996,8(6):1217-1221.
  • 5Xu Xiu-feng,Jeon J Y,Choi M H,et al.The modification and stability of γ-Al2O3 based catalysts for hydrolytic decomposition of CF4[J].J Mol Catal A,2007,266(1-2):131-138.
  • 6Niu Xian-jun,Sun Liang,Xu Xiu-feng.NF3 decomposition over Al2O3-based agents in the absence of water[C] //7^th Asia Pacific Conference on Sustainable Energy and Environmental Technology,Qingdao:[s.n.] ,2009,36.
  • 7Liu Qian,Wang Ai-qin,Wang Xiao-dong,et al.Synthesis,Characterization and catalytic applications of mesoporous γ-alumina from boehmite sol[J].Microporous Mesoporous Mater,2008,111(1-3):323-333.
  • 8Documentation of Threshold Limit Values and Biological Exposure Indices, 6th Ed.1991.
  • 9最新观测:三氟化氮应进温室气体“黑名单”[N].科技日报,2008(10).
  • 10范杰,徐秀峰,牛宪军.CF_4在Al_2O_3基金属氧化物上的分解反应[J].物理化学学报,2008,24(7):1271-1276. 被引量:5

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