微量气体定量分析的新方法:光腔衰荡光谱

A New Technique For Trace Gas Analyses: Cavity Ring-Down Spectroscopy

包括半导体制造业在内的许多工业应用要求高纯度气体具有最少的杂质。微量水分的分析特别富有挑战性。光腔衰荡光谱法不但可以快速、准确地分析包括水分在内的微量杂质,而且不需要标准样气。对光腔衰荡光谱法作了简要介绍。

High purity gases are required to have minimal contaminants by many industrial applications, including semiconductor manufacturing. Trace moisture analysis is particularly challenging. Cavity ring-down spectroscopy offers fast and accurate analysis of trace contaminants including moisture, without the need to provide a calibration standard. This article is a brief introduction to the technique.