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装置器壁烘烤出气与辉光放电清洗出气研究 被引量:1

Study on out-gassing by baking and glow discharge during wall conditioning of vacuum chamber
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摘要 建立了烘烤出气和辉光放电清洗(GDC)出气的物理模型,研究了装置器壁的烘烤出气和辉光放电清洗出气特点。烘烤出气是体出气,出气过程满足扩散方程;GDC出气是溅射脱附过程,它主要是器壁表面的溅射诱导出气。由此分析了HL-1M装置的烘烤出气和辉光放电清洗出气特点,得出了一些经验公式。 The model of out-gassing by baking and glow discharge cleaning (GDC) is set up. The properties of them are studied. Out-gassing by baking is from bulk and it obeys the diffusion equation. Out-gassing of glow discharge cleaning is mainly on surface, it is inducement out-gassing by sputtering. Thus the properties of out-gassing for baking and GDC on the HL-1M tokamak are analyzed. Some empirical formulas are given.
出处 《核聚变与等离子体物理》 EI CAS CSCD 北大核心 2007年第1期77-80,共4页 Nuclear Fusion and Plasma Physics
基金 广西青年基金资助项目(桂科青0229017)
关键词 出气 扩散 辉光放电 Out-gassing Diffusion Glow discharge cleaning
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参考文献3

  • 1LI Minux, DyUa H E Model for outgassing of water from metal surface [J]. J. Vac. Sci. Techn, 1993, A11(4): 1702.
  • 2LI Minux, DyUa H E Model for outgassing of water from metal surface [J]. J. Vac. Sci. Techn, 1994, A12(4): 1772.
  • 3LI Minux, Dylla H E Reduction of outgassing rate by GDC [J]. J. Vac. Sci. Techn, 1995, A13(3): 571.

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