CVD金刚石薄膜的织构与显微组织研究

Investigation of Texture and Microstructure in CVD Diamond Films

对直流电弧等离子喷射化学气相沉积法(CVD)制备的自支撑金刚石薄膜,用X射线衍射测量了薄膜织构,并用扫描电镜观察了薄膜显微组织。发现金刚石薄膜的织构为{110}、{111}、{112}和{221}等纤维织构。实验结果表明,金刚石薄膜比较致密并且晶形比较完整,不同生长因子对应不同立方体-八面体几何形状。分析和讨论了金刚石薄膜的制备工艺参数如衬底温度和甲烷浓度对其织构和显微组织产生的影响。

The texture and microstructure of free-standing diamond films which were synthesized by DC arc plasma jet chemical vapor deposition （CVD） were investigated by X-ray diffractometer and scanning electron microscopy （SEM）. It is found that the texture of diamond films consisted of { 110}, {111}, {112} and {221} fibre component. The experimental results indicate that the diamond films are dense and well crystallized, and the different cubo-octahedral geometry shapes for different growth factor. The influences of CVD diamond films deposition parameters such as substrate temperature and CH4 concentration on the texture and microstructure were discussed.