转动极板悬空设计的数字电容角位移传感器及其温度特性测试

Ungrounded-Rotor-Plate Designed Digital Capacitive Angular Sensor and Its Temperature Test

在比例式电容测角原理的基础上,设计了一种转动极板为金属材质且为电气悬空设计的数字型角位移传感器,满足180°的测量范围.该传感器具有本质可靠性,无需额外补偿环节,即可对环境温度,潮湿,灰尘等共模干扰具有良好的抑制作用.针对快速变化的温场,进行了基于该原理的角位移传感器的温度特性测试.在环境温度从-15℃升到+65℃,以约6℃/分钟速度变化的过程中,三台样机的最大峰峰值温漂值为0.085%/10℃,实验周期内的最大稳态温漂值为0.07%/10℃,标准不确定度小于0.1%,在以同样温变速度进行的-30℃～+80℃的宽温实验中,最大峰峰值温漂值小于0.2%/10℃.结果表明,其温漂指标优于目前基于差动测量原理的主流产品.

Based on ratiometric and capacitive measurement principle, a design of digital angular sensor with 180° measurement range which has a metallic and ungrounded rotor plate was presented here. This sensor has intrinsic reliability. It performs well on restraining common mode disturbances, like temperature, moisture, dust etc. , and without additional compensator. Focusing on temperature field with rapid changing rate in this study, temperature tests on the prototypes of angular sensor based on this principle are described. The results show that the maximal peak-peak temperature drift of the prototypes is 0. 085%/10℃, when the environmental temperature climbs from-15℃ up to ＋65＂C at about 6℃/min rate. During the whole testing period, the maximal steady temperature drift is 0. 07%/10℃ and the stand- ard uncertainty is less than 0. 1%. Additionally, for a wide-temperature-range test （-30℃～＋80℃） with the same change in rate, the maximal peak-peak temperature drift is less than 0. 2%/10℃. Its ability on restraining temperature drift is better than that of mainstream products based on differential measurement principle.