一种面向微型传感器的新型微能源的结构设计与仿真

Design and Simulation of a Novel Micro Power System for Micro Sensor Devices

传统同位素微电池的能量转换结构采用单层阵列形式,造成电池输出功率较小,不能满足微型传感器件的需求.设计了一种基于大阵列多层压制的能量转换结构,以引入高深宽比工艺并增大比表面积,从而提高了放射源利用率,使得微电池可以根据微型传感器件的需求作出设计,并能与其进行工艺集成.对这种结构的微电池性能进行仿真得到最佳p-n结结深,结果证明了该结构具有较高的输出功率.

Traditional Radioisotope Micro Battery （RMB） with direct conversion device of single layer array does not meet the requirements of micro sensor devices for its lower output power. A novel direct conversion device of large array and multi-layers is designed to induce the HARMST （High Aspect Ratio Micro Systems Technology） that results in high efficiency of radio source and large surface area. It could be designed according to the requirements of micro sensor devices, and its process could be integrated with the micro sensor devices. The performance simulation is utilized to the optimal p-n junction depth. The results demonstrate that this direct conversion device has higher output power.