摘要
针对电容式MEMS器件,设计了一种用来检测微小差分电容的电路,该电路主要有方波信号发生器、相敏解调和低通滤波电路等组成.具有抗干扰性能好、电路简单、易于集成的特点.通过主要器件———运放的合理选择,调试出较理想的结果.经实验验证,其分辨率可达10-16F.
A circuit to detect the micro-differential capacitance was designed, which can be successfully applied in the capacitive MEMS devices. The circuit mainly was composed of a generator circuit of rectangle wave, phase sensitive demodulation and low pass filter circuit. This circuit was simply and easy to integrate, it has a good anti-disturbed ability, the main component is amplifier, through the choice of the amplifier ,can get the ideality wave. Experiment results shown it precision can reach 10^-16F.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第6期2529-2531,共3页
Chinese Journal of Sensors and Actuators
基金
武器装备预先研究项目资助(514090304B0401)
山西省自然科学基金资助(20051040):"新世纪优秀人才支持计划"(NCET-04-0259)
关键词
差分电容
充放电
相敏解调
difference capacitance
charge up and discharge
phase sensitive demodulation
