一种基于静电排斥力的纵向微驱动器研究

Research on an Electrostatic Repulsive-Force Based Vertical Micro Actuator

为了消除静电塌陷对静电吸引力微驱动器冲程的限制,设计了一种基于静电排斥力的纵向微驱动器实现结构,其可动电极和固定电极在工作过程中互相远离,可以从根本上解决静电塌陷问题,且冲程不受牺牲层厚度的限制;借助Maxwell2D软件,采用数值仿真方法,研究了微驱动器结构参数对静电排斥力大小的影响.数值仿真结果表明,梳齿电极水平间距,固定/可动梳齿电极宽度和两者的比值都是影响静电排斥力大小的关键因素.

A structure of micro actuator based on electrostatic repulsive-force is presented to achieve a vertical stroke. Compared with traditional electrostatic attractive-force based micro actuator, its stroke is neither limited by the pull-in instability nor limited by the thickness of sacrificial layer. Numerical simulations are performed to investigate the relationship between the repulsive-force and the structural parameters. Simulation results show that the repulsive-force is highly dependent on fixed finger width, movable finger width, fixed/movable finger width ratio and finger distance.