镀锡钢板辉光放电发射光谱法定量深度分析研究

Quantitative depth profile analysis of tinplate with glow discharge optical emission spectrometry

通过研究不同放电条件下镀锡钢板的光谱行为,确定了具有较好深度分辨率的放电条件,建立了镀锡钢板的辉光放电发射光谱定量深度分析方法。研究了深度分析中基体材料的溅射率对工作曲线的影响。经溅射率校正后的工作曲线线性较好,大部分元素的相关系数在0.99以上。辉光光谱定量转化所得深度结果与表面形貌仪测定相应溅射坑的深度结果对比发现,本方法定量转化深度结果准确可靠。辉光光谱法与化学法测定样品镀锡量结果对比发现,化学法所得结果与本方法中积分到锡铁曲线交点处的结果一致。在此基础上,建立了镀锡钢板镀层厚度结构模型,定义了镀层的表观厚度。

Discharge conditions at which depth profile analysis of tinplate had good depth resolution were selected by researching spectrometric behaviors of tinplate at different discharge conditions. A glow discharge optical emission spectrometry（GD-OES） for quantitative depth profile analysis of tinplate was established and the influences of sputter rate of different matrix materials on calibration curves were studied. Linearity of the calibration curves was rather good after correction of sputter rate, with correlation coefficients of above 0. 99 for most elements. Compared with sputter crater depth results measured with surface profilometer, the converted depth results obtained by GD-OES were accurate and credible. The coating mass results found by GD-OES （integrating from the coating surface to the cross point of Sn and Fe curve） were consistent with those obtained by chemistry. Based on this, coating thickness structure of tinplate was put forward and the concept of coating apparent thickness was defined.