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压电叠堆泵微位移放大机构的试验研究 被引量:13

Study on a Micro-displacement Magnifying Mechanism Used on Piezo-stack Pump
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摘要 提出了一种应用于压电叠堆泵的微位移放大机构,该机构以压电叠堆(积层式压电微位移器)为驱动元件,通过基于三角形放大原理的柔性铰链放大机构,放大压电叠堆的输出位移。同时,设计、研制了实验装置,并在试制样机上对其静、动态特性进行了实验。实验测试结果表明,该机构具有线性良好、高分辨率和高频响应等特点。 In this paper, a micro - displacement magnifying mechanism,which was applied to piezo -stack pump, was presented. The amplifier was driven by piezoelectric multilayer actuators. The displacement of piezoelectric multilayer actuator was amplified by the flexure hinges amplifier based on the principles of triangle amplification. The static and dynamic characteristics were tested on the prototype. The characteristics of good linearity, high resolution and high frequency were approved.
出处 《机械与电子》 2007年第3期75-77,共3页 Machinery & Electronics
关键词 压电叠堆 放大机构 柔性铰链 三角形 放大 piezo - stack magnifying mechanism flexure hinge triangle amplification
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