基于嵌入式Linux的实时光学膜厚监控系统的开发

Development of Real-time Optical Thin Film Thickness Monitoring System Based on Embedded Linux

在嵌入式Linux基础上,从图形用户界面的设计、数据处理模块的设计以及两部分联合工作等方面介绍了实时光学膜厚监控系统的设计和实现。实验表明,该系统能够对光学薄膜镀制过程进行实时在线跟踪。

This paper presents a realization of real-time optical thin film thickness monitoring system based on embedded Linux and Mini GUI.We design a good graphic user interface,improve the judgment approach of maximum value and develop ADC driver.Finally,an experiment result is given to prove the usability and correctness of this system.it shows that there will be a Qood value in the application of this system.