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Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO_3 Intensity Modulator 被引量：2

Mach-Zehnder Type Annealed Proton Exchange Waveguide and Coplanar Waveguide Modulation Electrode LiNbO_3 Intensity Modulator
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摘要 The characteristics of a conventional LiNbO3 intensity modulator made up of a Mach-Zehnder(MZ) type annealed proton exchange(APE) waveguide and coplanar waveguide(CPW) modulation electrode are presented. The APE waveguide characteristics and their relations with process parameters are analyzed. At the same time, the electrical characteristics of modulation electrode, such as modulation voltage, microwave effective index associated with modulation bandwidth, characteristics impedance, are also investigated in detail. The characteristics of a conventional LiNbO3 intensity modulator made up of a Mach-Zehnder （MZ） type annealed proton exchange（APE） waveguide and coplanar waveguide（CPW） modulation electrode are presented. The APE waveguide characteristics and their relations with process parameters are analyzed. At the same time, the electrical characteristics of modulation electrode, such as modulation voltage, microwave effective index associated with modulation bandwidth, characteristics impedance, are also investigated in detail.
作者 HE Jian ZHU Xue-jun
机构地区 Chongqing Optoelectronics Research Institute
出处 《Semiconductor Photonics and Technology》 CAS 2007年第1期69-75,共7页 半导体光子学与技术（英文版）
关键词 退火质子交换波导 铌酸锂亮度调制器 共平面形波导 调制电极 intensity modulator APE waveguide CPW
分类号 TN252 [电子电信—物理电子学]
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参考文献16

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Semiconductor Photonics and Technology
2007年 第1期

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