摘要
本文对一种汽车用MEMS压力传感器中的键合金线,在加速振动试验时的疲劳情况进行了研究。首先简单介绍了MEMS压力敏感芯片引线键合以及引线的基本情况,然后利用有限元方法对引线在20g的加速振动下的疲劳和寿命进行了分析,并利用了概率上的冗余理论对键合工艺提出了改进,最后给出了实际的结果,证实了模拟和改进工艺的合理性。
The vibration fatigue properties of the bonded Au-wire used in MEMS pressure sensor for automobile in the vibration test are researched in this paper. Firstly, the basic information about the wire and wird bonding of MEMS pressure-sensitive cell are introduced briefly . Secondly, the properties analysis for the fatigue and working life of wire in the 20g of acceleration are given by the finite element method. The improvements approach of bonding technique is discussed on the base of probability redundancy theory . Finally, the results are given and prove that the emulations and improvements are rational.
出处
《传感器世界》
2007年第3期10-12,共3页
Sensor World
