基于MEMS技术的硅微机械流体传感器的原理及应用

Principle and Application of Silicion Micromachined Fluid Sensor Based on MEMS

传统的流体传感器由于存在着灵敏度低、体积大、成本高等缺点,而且微流体与宏观流体流动特性不同,所以其在微流体的流体特性测量中存在很大的局限性。随着MEMS技术的发展,硅微机械流体传感器的出现克服了传统流体传感器的缺点。硅微机械流体传感器已成为MEMS的研究热点之一。按其用途进行了分类,着重介绍了流体压力传感器、流量传感器和表层摩擦力传感器。分别从各种传感器的基本原理、性能、应用范围、优缺点及其所能达到的技术指标方面进行了描述。基于MEMS的硅微机械流体传感器具有广阔的前景。

Because the traditional fluid sensor has the shortcomings, sush as low sensitivity,higher cost and so on ,and Macrofluidic is different with microfluidic in it＇ s fluid Characteristics, so it exist large limitation in microfluidics measurernents of the fluid nature. With the developmont of MEMS technology, the emergency of it overcome shortcoming of traditional fluid sensor. Silicon micromachined fluid sensors has become one of hot spot of the MEMS. Classifies it according to it＇ s using and introduce fluid press sensor,flow sensor and friction force sensor.Describe the basic principle of each silicon micromachined fluid sensors,It＇ s performace ,scope of the application and technical indicator. Its broad prospect.