纳米粒径RGTO SnO_2薄膜的制备及气敏特性研究

Growth of Nano-Particulated SnO_2 Film by Rheotaxial Growth & Thermal Oxidation and Its Gas Sensing Properties

针对RGTO SnO2薄膜颗粒粒径较大的问题,通过控制直流磁控溅射时的溅射气压,制备出了纳米粒径RGTO SnO2薄膜,用SEM表征了其形貌及粒径分布,研究了溅射气压对其形核及生长过程的影响,测试了薄膜对乙醇的气敏特性。研究结果表明,改变溅射气压能够有效控制RGTO SnO2薄膜的粒径,这种控制作用主要发生在形核阶段,是通过溅射气压对沉积速率的影响产生的;气敏测试结果证实了该纳米粒径敏感膜具有较高的灵敏度和较快的响应恢复特性。

The nano-particulated SnO2 films were prepared by rheotaxial growth and thermal oxidation（RGTO） technique.The microstructures and particle size distribution of the RGTO SnO2 films were characterized with scanning electron microscopy（SEM）.The results show that the particle size of the films depends on the deposition rate in the nucleation stage of Sn films and the deposition rate can be well controlled by sputtering pressure. When tested with ethanol, the fdms display a high sensitivity and fast response and recovery characteristic.