6Gao L,Li Q,Song Z,et al.Preparation of nano-scale titania thick film and its oxygen sensitivity[J].Sensors and Actuators B,2000,71:179-183.
7Young U A,Kim J E,Kim H T,et al.Variation of structural and optical properties of sol-gel TiO2 thin films with catalyst concentration and calcination temperature[J].Materials Letters,2003,57:4660-4666.
8Diana M,Tasca M,Delibas M,et al.On the structural properties and optical transmittance of TiO2 r.f.sputtered thin films[J].Applied Surface Science,2000,156:200-206.
9Bonini N,Carotta M C,Chiorino A,et al.Doping of a nanostructured titania thick film:structural and electrical investigations[J].Sensors and Actuators B,2000,68:274-280.
10Wu Q H,Lee K M,Liu C.Development of chemical using sensors microfabrication and micromachining techniques[J].Sensors and Actuators B,1993,13-14:1-6.
