准分子激光加工与研磨加工Al_2O_3陶瓷表面形貌的比较

Comparisons on the Al_2O_3 Ceramic Surface Topography Processed by Excimer Laser and Grinding

采用了准分子激光和研磨两种不同的加工方法,在微构件常用的Al2O3陶瓷材料表面构建表面微观形貌.通过表面轮廓仪测量加工试件表面形貌,采用自行研制的表面形貌参数表征系统进行表面形貌统计参数计算.分析不同加工方法对同一种材料表面形貌的影响,采用表面形貌统计参数中的轮廓高度算术平均值Ra、轮廓高度均方根值Rq、坡度均方根值.Zq对表面形貌进行评价.结果表明,准分子激光加工表面的Ra、Rq和.Zq值均比研磨加工表面小.分析可得,准分子激光加工与传统研磨加工方法相比,能够获得较高要求的表面形貌,为微机械的设计提供重要参考依据.

Excimer laser texturing and grinding was performed on the surfaces of Al2O3 ceramic which is used regularly in MEMS. By the means of surface profile equipment, the machined surface was measured and the statistical parameter of surface topography was calculated. In this article, the effect on the surface topography of the same material was analyzed by different processing methods, the value of surface parameter arithmetic mean Ra, rootmean-square roughness Rq and gradient root-mean-square value Zq were used to appreciate the surface topography, and the data were processed with the software Matlab. The results show that the values of Ro, Rq, Zq of the excimer laser texturing surfaces are smaller than those by that of the grinding. It can be concluded that we can get the better surface roughness by excimer laser texturing in contrast to the grinding