期刊文献+

滑条式静磁微执行器的pull-in现象分析 被引量:3

Pull-in Phenomenon Analysis of Magnetostatic Micro-Actuator with Sliding Slab
下载PDF
导出
摘要 从滑条式静磁微执行器的模型出发,应用静磁微执行器的pull-in方程,分析了滑条式静磁微执行器的pull-in现象,用磁动势控制模型和力学平衡两种方式得出了执行器的吸合位置及吸合时的磁动势.对于特定的滑条式磁微执行器结构,pull-in位置为初始气隙宽度的1/3处.算例计算结果表明,该静磁微执行器的pull-in磁动势仅为3.84A. Using the magnetic pull-in equation, the model of a magnetostatic micro-actuator with sliding slab was discussed. The pull-in point and the pull-in magneto-motive-force (MMF) were obtained by using the MMF-controlled model and the equilibrium in mechanics. The results indicate that the ratio of the pull-in point to the original width of the air gap is 1/3. An example was given, and the results suggest that the pull-in point can be easily obtained compared with the electrostatic micro-actuators, and the pull-in MMF is only 3.84 A.
出处 《纳米技术与精密工程》 EI CAS CSCD 2007年第1期55-59,共5页 Nanotechnology and Precision Engineering
基金 国家自然科学基金资助项目(10476019).
关键词 微执行器 pull-in现象 磁动势 滑条式 micro actuator pull-in phenomenon magneto motive force (MMF) sliding slab model
  • 相关文献

参考文献22

  • 1宫峰飞.微驱动器的原理与应用[J].电子元件与材料,2003,22(6):33-36. 被引量:11
  • 2[2]Sadler D J.Micromachined spiral inductor using UV-techniques[J].IEEE Transactions,2001,37(4):2897-2899.
  • 3朱珂,黄庆安,姚建南.磁微执行器的原理及应用[J].测控技术,2000,19(3):1-5. 被引量:10
  • 4[4]Anonymous.A magnetic MEMS-based RF relay[J].Microwave Journal,2004,47(1):124,126,128,130.
  • 5[5]Yong S Y,Ki D B,Jin H K,et al.A low voltage actuated micro mirror with an extra vertical electrode for 90°rotation[J].Micromech Microeng,2003,13(6):922.
  • 6[6]Dario P,Carrozza M c,Stefanini C,et al.A mobile microrobo tactuated by a new electro magnetic wobble micromotor[J].IEEE PASME Transactions on Mechatronics,1998,3(1):9-16.
  • 7余洪斌,陈海清,刘彦,李俊.磁驱动MEMS光开关的设计、分析和仿真[J].华中科技大学学报(自然科学版),2006,34(4):18-20. 被引量:3
  • 8[9]Rocha L A,Olffenbuttel Cretue.RF behavioral analysis ofthe pull-in dynamic transition[J].Micromechanicals Microengineer,2004,14:S37-42.
  • 9[10]Degani O,Socher E,Lipson A,et al.Pull-in study of an electrostatic torsion microactuator[J].Microelectromech Syst,1998,7:373-379.
  • 10[11]Gupta R K.Electrostatic Pull-In Test Structure Design for In-Situmechanical Property Measurements of Microelectrome-chanical Systems(MEMS)[D].Mas:Mas Institute Technologv.1997.

二级参考文献77

  • 1[1]Hyman D, Mehragany M. Contact physics of gold microcontacts for MEMS switches. IEEE Trans Comp Packag Technol, 1999;22(9):357~364
  • 2[2]Muldavin J B, Rebeiz G M. All-metal series and series/shunt MEMS switches. IEEE Microwave Wireless Compon Lett, 2001;11(9):373~375
  • 3[3]Balaraman D, Bhattacharya S K, Ayazi F. Low-cost low actuation voltage copper RF MEMS switches. IEEE MTT-S Digest,2001:1 225~1 228
  • 4[4]Rebeiz G M, Muldavin J B. RF MEMS switches and switch circuits. IEEE Microwave Magazine, 2001;12:59~71
  • 5[5]Goldsmith C L, Yao Z, Eshelman S, et al. Performance of low-loss RF MEMS capacitive switches. IEEE Microwave Guided Wave Lett.,1998;8(8):269~271
  • 6[6]Barker N S, Rebeiz G. Distributed MEMS true-time delay phase shifters and wide band switches. IEEE Trans Microwave Theory Tech,1998;46(11):1 881~1 889
  • 7[7]Clemens B M, Bain J A. Stress determination in textured thin films using X-ray diffraction. MARS BULLETIN/JULY, 1992:46
  • 8[1]GREYWALL D S,CHIEN-SHING PAI,SANG-HYUN OH,et al.Monolithic fringe-field-activated crystalline silicon tiltingmirror devices [ J].Microelectromechanical Systems,2003,12:702-707.
  • 9[2]GREYWALL D S,BUSCH P A,PARDO F,et al.Crystalline silicon tilting mirrors for optical cross-connect switches [J].Microelectromechanical Systems,2003,12:708-712.
  • 10[3]CAMON H,LARNAUDIE F.Fabrication,simulation and experiment of a rotating electrostatic silicon nirror with large angular deflection [ A] The Thirteenth Annual International Conference on Micro Electro Mechanical Systems [C].Shimoyama Miyazaki Japan:IEEE,2000.571-576.

共引文献28

同被引文献28

引证文献3

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部