摘要
从滑条式静磁微执行器的模型出发,应用静磁微执行器的pull-in方程,分析了滑条式静磁微执行器的pull-in现象,用磁动势控制模型和力学平衡两种方式得出了执行器的吸合位置及吸合时的磁动势.对于特定的滑条式磁微执行器结构,pull-in位置为初始气隙宽度的1/3处.算例计算结果表明,该静磁微执行器的pull-in磁动势仅为3.84A.
Using the magnetic pull-in equation, the model of a magnetostatic micro-actuator with sliding slab was discussed. The pull-in point and the pull-in magneto-motive-force (MMF) were obtained by using the MMF-controlled model and the equilibrium in mechanics. The results indicate that the ratio of the pull-in point to the original width of the air gap is 1/3. An example was given, and the results suggest that the pull-in point can be easily obtained compared with the electrostatic micro-actuators, and the pull-in MMF is only 3.84 A.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2007年第1期55-59,共5页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(10476019).
关键词
微执行器
pull-in现象
磁动势
滑条式
micro actuator
pull-in phenomenon
magneto motive force (MMF)
sliding slab model