摘要
化学流体沉积(Chemical Fluid Deposition,CFD)是近年来新发展的一种材料制备方法。与化学气相沉积(CVD)等其它传统方法相比,具有很多突出优点。本文在论述CFD方法的原理、特点及典型反应装置的基础上,重点就CFD的研究现状、优势以及目前尚存在的不足进行了分析讨论,指出了CFD在制备纳米复合材料中的作用、发展前景和今后应该注意解决的关键问题。
Chemical fluid deposition (CFD) is a new method developed in recent years for preparing materials. It has a lot of advantages compared with chemical vapor deposition ( CVD). The mechanism, property and typical experimental equipment of CFD are discussed. In this paper, the advantages and disadvantages of CFD are emphasized and discussed in detail. The applications of CFD in the field of nano-composite materials preparation are also reviewed. The prospect and the key problems needed to be solved in the future when using CFD method are put forward.
出处
《化学通报》
CAS
CSCD
北大核心
2007年第3期188-194,共7页
Chemistry
基金
辽宁省石油化工技术与装备重点实验室开放课题资助项目
关键词
超临界流体技术
CFD
纳米复合材料制备
化学流体
Supercritical fluid technology, Chemical fluid deposition, Nano-composite materials