磷化铟单晶生长中的传热和流动分析

NNUMERICAL ANALYSIS OF THERMAL AND FLOW FIELD IN THE GROWTH OF SINGLE-CRYSTAL INP

用有限元法对轴向磁场存在下3英寸磷化铟单晶液封提拉法生长中的传热和流动进行了求解．结果表明:液封改变了晶体表面被封部分的换热,进而影响生长界面的形状．增加磁场强度能有效减弱熔体和封层内的流动,并使生长界面形状发生变化。增加提拉速度,生长界面形状由凸变凹．随晶体转速的增加,多涡胞流动出现．

A set of numerical calculation for momentum, heat transfer for a 3 inch diameter liquid encapsulant czochralski growth of single-crystal InP with an axial magnetic field is conducted by using the finite-element method. The results show that the encapsulant changes the conditions of the radiation and convective heat transfer on the crystal surface, this results in a dramatically change of the interface shape. With increasing the magnetic field strength, the flow in both the melt and the encapsulant decreases. As a consequence, the interface shape changes from convex to concave （to the melt）. With enhancing the pulling rate, the interface shape convents from convex to concave. Multi-cell flow pattern may appear in the melt with large crystal rotation rate.