氧化物薄膜研制中的电子能谱技术

Application of electron spectroscopy in the fabrication of thin oxide films

随着科学技术的不断发展,人们正在寻求更新的实用材料.金属氧化物,包括金属氧化物薄膜的各种实用材料,在工业界、信息产业界和能源开发等方面的应用前景,早已引起国内外学者的极大关注.例如,由于氧化物具有各种特殊的介电和光学性质,研究和开发基于氧化物薄膜的气敏材料非常热门.如何制备出有实用价值的各种薄膜材料,是科学家们一直关心和深入研究的课题.电子能谱技术在各种材料的基础研究和实际应用中起着重要的作用.本文以有序金属氧化物薄膜研制为例,简要评述了电子能谱技术(包括X射线光电子能谱(XPS),紫外光电子能谱(UPS),俄歇电子能谱(AES)和高分辨电子能量损失谱(HREELS)),以及低能电子衍射(LEED)等技术在氧化物薄膜材料制备和表征中的应用.

Various electron spectroscopy techniques are widely used both in basic research and in applied analysis of materials. Metal oxides including oxide films have attracted great interest due to their special physical and chemical properties for use in many areas including the information industry, energy sources, and so on. For instance, due to their special dielectric and optical properties oxide films are very important materials used in gas sensors. In this review I show some examples of applications of various types of electron spectroscopy,including X- ray photoelectron, Auger electron, ultraviolet photoelectron and high resolution electron energy loss spectroscopy,as well as low energy electron diffraction techniques in oxide film preparation and characterization.