摘要
溅射产额是表征溅射效应的重要参数。Sigmund的线性级联碰撞理论在溅射产额计算中获得了广泛的应用和发展。本文对Sigmund理论进行简单介绍,并对基于Sigmund理论的各种经验公式进行分析。在此基础上,对不同条件下的溅射产额进行了计算,通过计算结果,对各种公式的使用范围进行了讨论。
Sputtering yield is an important parameter characterizing the sputtering effect, to which the Sigmund＇s linear collision cascade theory is widely applied in calculation. Describes briefly the Sigmund＇s theory and analyzes various empirical formulas based on the theory. Then, the sputtering yields under different conditions are calculated to discuss what fields those empirical formulas are available to use.
出处
《真空》
CAS
北大核心
2007年第2期44-47,共4页
Vacuum
