定容式流导法气体微流量校准装置测量不确定度的评定

Uncertainty evaluation for tiny gas throughput calibrator by way of constant volume/conductance

介绍了定容式流导法气体微流量校准装置的组成及校准方法，并着重对测量不确定度进行了评定。通过评定在定容式流量计的校准范围（1×10^-3～5×10^-6）Pa·m^3／s内，其合成标准不确定度为1，O％；在固定流导法流量计的校准范围（5×10^-4～5×10^-11）Pa·m^3／s内，其合成标准不确定度为1．4％～1.8％。

Introduces the design and calibration principle of tiny gas throughput calibrator by way of constant volume/conductance, with the evaluation of the uncertainty in calibration results emphatically discussed, Resulting from the evaluation, the relative standard-combined uncertainty of constant volume flowmeter is 1, 0% in the calibrating range from 1 × 10^-3 to 5 × 10^- 6 Pa· m^3/s,and that of constant conductance flowmeter is 1.4 % - 1. 8 % from 5 × 10^- 6 to 5 × 10^- 11 Pa · m^3/s.