摘要
介绍了定容式流导法气体微流量校准装置的组成及校准方法,并着重对测量不确定度进行了评定。通过评定在定容式流量计的校准范围(1×10^-3~5×10^-6)Pa·m^3/s内,其合成标准不确定度为1,O%;在固定流导法流量计的校准范围(5×10^-4~5×10^-11)Pa·m^3/s内,其合成标准不确定度为1.4%~1.8%。
Introduces the design and calibration principle of tiny gas throughput calibrator by way of constant volume/conductance, with the evaluation of the uncertainty in calibration results emphatically discussed, Resulting from the evaluation, the relative standard-combined uncertainty of constant volume flowmeter is 1, 0% in the calibrating range from 1 × 10^-3 to 5 × 10^- 6 Pa· m^3/s,and that of constant conductance flowmeter is 1.4 % - 1. 8 % from 5 × 10^- 6 to 5 × 10^- 11 Pa · m^3/s.
出处
《真空》
CAS
北大核心
2007年第2期55-58,共4页
Vacuum
关键词
流量计
定容
固定流导
校准装置
校准方法
不确定度评定
flowmeter
constant volume
constant conductance
calibrator
calibration method
uncertainty evaluation