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微细电解线切割加工的基础研究 被引量:13

Foundational Investigation on Wire Electrochemical Micro-machining(WEMM)
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摘要 基于电化学原理,讨论了纳秒脉冲电流微细电解线切割加工的机理,建立了微细电解线切割加工数学模型;采用电化学腐蚀原理对微米尺度线电极进行在线制作,建立了微细电解线切割加工试验系统,并进行了微细电解线切割加工试验,切割出带90°直角的微结构,其切缝宽度为30μm。 Based on electrochemical principle,the mechanism of nanosecond pulses WEMM was investigated, and the mathematical model of WEMM was found. Based on electrochemical etching principle, the micrometer scale wire electrode was online fabricated, and the equipment of WEMM was established. On experiment of WEMM,micro structure with 90 degrees right angle is fabricated, which is formed by the groove of 30 micrometer in width.
出处 《中国机械工程》 EI CAS CSCD 北大核心 2007年第7期833-837,共5页 China Mechanical Engineering
基金 国家自然科学基金资助项目(50575105)
关键词 微细电解线切割加工 纳秒脉冲 线电极 电化学腐蚀 wire electrochemical micro-machining nanosecond pulse wire electrode electrochemical etching
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参考文献5

  • 1Ehrfeld W.Electrochemistry and Microsystems[J].Electrochimica Acta,2003,48(2022):2857-2868.
  • 2Schuster R,Kirchiner V,Allongue P,et al.Electrochemical Micromachining[J].Science,2000,289(5476):98-101.
  • 3Trimmer A L,Hudson J L,Kock M,et al.Single-step Electrochemical Machining of Complex Nanostructures with Ultrashot Voltage Pulses[J].Applied Physics Letters,2003,82(19):3327-3329.
  • 4Ehrfeld W.Electrochemistry and Microsystems[J]. Electrochimica Acta,2003,48(2022):2857-2868.
  • 5Kim B H,Na C W,Lee Y S,et al.Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid[J].Annals of the CIRP,2005,54(1):191-194.

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