高精度数字压力计的研制

The Development of High Precision Digital Pressure Meter

扩散硅压力传感器具有体积小、灵敏度高、响应速度快等优点，但存在温度漂移和非线性问题，这是研制高精度数字压力计必须解决的技术难点．本文分析并建立了对其实现综合补偿的方程式，利用单片微机软件实现综合补偿方程，较好地解决了压力传感器的非线性、温度补偿和零点修正．研制出的数字压力计精度达０．０５级．

The silicon pressure resistor sensor has the advangtages of compactness,high sensitivity and rapid response.But the sensor has temperature drift and non-linear.This is the major technical problem to be solved in developing high precision digital pressure meters.The paper analizes and sets up a formula used to realize its compound compensation. Using single-chip microcomputer software designed to realize compound compensation formula solves the problems of nonlinear, temperature and zero-drift compensation of the pressure sensor satisfactorily.The designed digital pressure meter reaches the precision level of 0.05%.