摘要
在对非球面加工过程中常用检测方法的优缺点进行比较的基础上，介绍了Ronchi光栅法的系统组成、工作原理和数据处理方法，并进行了光栅频率和灵敏度分析．通过对Ronchi光栅的频率、灵敏度的分析比较，发现可以通过改变其频率来实现犬口径非球面不同加工阶段2～200μm范围内的误差检测。该方法制作简单，使用方便。它的深入研究，将为犬口径非球面精磨和初抛光阶段提供一种有效、可靠的定量检测手段。
The configuration of Ronchi grating test system and principle including the method of data processing are introduced on the basis of summing up conventional testing methods for fabrication of aspheric surfaces. With analyzing the frequency and sensitivity of the grating, the test method for large-aperture aspheric surface, which changes the frequency of Ronchi grating to test the error range from 2μm to 200μm during different optical manufacture process, can be obtain. This method is very simple and convenient. The further research may provide an effective and reliable quantitative testing method for the exact-grinding and initial polishing of aspheric surfaces.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2007年第4期140-144,共5页
Opto-Electronic Engineering
关键词
郎奇光栅
郎奇条纹
补偿光栅
大口径非球面
Ronchi grating
Ronchi ruling
Null grating
Large-aperture aspheric surface
