采用无机盐和表面活性剂的新型溶胶-凝胶法制备氧化铝薄膜研究

PREPARATION OF ALUMINA FILMS BY NOVEL SOL-GEL PROCESS USING INORGANIC SALT AND SURFACTANT

以乙醇为溶剂,三氯化铝[AlCl3.6H2O]为前驱物,采用溶胶凝胶法,通过引入乙酰丙酮(AcAc)和表面活性剂十六烷基溴化铵(CTB),制备了氧化铝纳米薄膜,并对其性状、结构等进行了研究.结果表明,乙酰丙酮和Al3+反应形成了络合物,XRD结果表明,在550℃以下,氧化铝膜为非晶态,550℃以上氧化铝膜为晶态θ-Al2O3,在1100℃转化为α-Al2O3.SEM观察表明这种氧化铝膜不但平整、致密,而且晶粒很小.

A novel sol-gel technique was developed to make alumina film, by using alcohol as solvent, AlCl3·6H2O as precursor, acetylacetone （AcAc） and cetyhrimethylammonium bromide （CTB） as chemical modification and surfactant. The results show that AcAc and aluminum form a complex Compound in the sol solution ,which makes the sol very stable. The as-fabricated film is amorphous. When calcining at temperature up to 550℃, film transformed to crystalline θ-Al2O3, and then transformed to α-Al2O3 at 1100℃. SEM observation indicated that the film is smooth, dense, with fine grains.