玻璃粉粘结剂对丝网印刷Zr-V-Fe吸气剂薄膜吸气性能的影响

Influence of Glass Frit on Sorption Properties of Zr-V-Fe Getter Films Prepared by Screen Printing

利用丝网印刷技术制备Zr-V-Fe吸气剂薄膜。以Pb玻璃粉作为薄膜与基片的粘结剂,研究了三种不同退火温度下制备的Zr-V-Fe吸气剂薄膜的吸气性能,通过XRD,FESEM,EDS及吸气性能测试,分析讨论了薄膜的相组成、表面形貌和表面成分对吸气性能的影响。结果表明,退火温度变化会使薄膜表面Pb含量发生改变,从而引起吸气剂薄膜的吸气性能发生变化,在玻璃粉的熔点温度(350℃)进行退火,所得的薄膜具有更多清洁有效的表面,此时玻璃粉对薄膜的吸气性能影响最小,薄膜的吸气性能最佳。

Zr-V-Fe getter films were prepared byscreen printing, using Pb glass frit as the binders between films and substrates. The sorption properties of the Zr-V-Fe getter films prepared at three different annealing phases, temperatures were investigated. The effects of surface morphology and surface composition of the films on the sorption properties were investigated by XRD, FESEM, EDS and the test of sorption properties. The results showed that altering the annealing temperature would change the Pb content of the getter films surface, and then the sorption properties of the Zr-V-Fe getter films are also changed. The Zr-V-Fe getter films with cleaner and more effective surface could be prepared at the annealing temperature of the melting point of glass frit（350 ℃）. The glass frit had the least effeet on the sorption properties of the films and the getter films had the optimal sorption properties under this eondition.