超薄微通道水冷铜镜的结构优化设计

Structure optimization design of water-cooled copper mirror with micro-channel

采用ANSYS有限元软件对强激光作用下的超薄微通道水冷铜镜的温度场分布和热变形进行了系统模拟,研究了超薄微通道水冷铜镜的结构对镜面变形峰谷值的影响.结果表明:采用水冷可以大大降低镜面变形的峰谷值;水冷铜镜的结构对镜面变形峰谷值有很大的影响.镜面厚度、水槽尺寸以及水冷区域的大小都是重要的影响因素,其中以水冷区域的大小影响尤甚.与当今广泛使用的水冷镜不同,本研究表明水冷区域并不是越大越好,而是有一个最佳值.

The temperature and thermal deformation distributions of the water-cooled Cu mirror with micro-channel were simulated using ANSYS finite element analysis. The results show that the structure of the mirror has significant effects on the thermal deformation, with the thickness of the mirror, channel size and the cooling area being the main factors. Among these factors, the cooling area shows the most significant role. The water cooling may reduce the thermal deformation significantly. However, the whole cooling mirror is not the optimal structure, even small deformation can be achieved by using partial cooling area.