摘要
惯性冲击式压电微电机是近年来出现的一种新型驱动装置。阐述了微电机的工作原理和运动过程,提出了几种机械结构的设计方法并进行了对比,对微电机模型进行了动力学分析,设计了相关的驱动电源并进行了实验。经验证,设计的微电机工作性能稳定,最大运动速度为150μm/s。
Impact Drive Mechanism （IDM） is a new type of actuator invented in recent years. The operating principle and moving process of this micro-motor are presented in this paper. Three mechanical structures are proposed and compared. A dynamic model is built and analyzed. A driving power of this motor is also designed, It is confirmed that the motor designed in this article can work stably and has the maximal velocity of 150 μm/s.
出处
《压电与声光》
CSCD
北大核心
2007年第2期187-189,共3页
Piezoelectrics & Acoustooptics
